Laser Annealing Processes in Semiconductor Technology

Book Laser Annealing Processes in Semiconductor Technology Cover

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  • Publisher : Woodhead Publishing
  • Release : 21 April 2021
  • ISBN : 9780128202562
  • Page : 426 pages
  • Rating : 4.5/5 from 103 voters

Download Laser Annealing Processes in Semiconductor Technology in PDF, Epub and Kindle

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors

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Laser Annealing Processes in Semiconductor Technology

Laser Annealing Processes in Semiconductor Technology
  • Author : Fuccio Cristiano,Antonino La Magna
  • Publisher : Woodhead Publishing
  • Release Date : 2021-04-21
  • ISBN : 9780128202562
GET THIS BOOKLaser Annealing Processes in Semiconductor Technology

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal

Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 1986
  • ISBN : UFL:31262082107649
GET THIS BOOKScientific and Technical Aerospace Reports

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 8

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 8
  • Author : F. Roozeboom,P.J. Timans,K. Kakushima,H. Jagannathan,Z. Karim,E. P. Gusev,S. De Gendt
  • Publisher : The Electrochemical Society
  • Release Date : 2018-05-04
  • ISBN : 9781607688341
GET THIS BOOKSilicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 8

Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9

Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9
  • Author : F. Roozeboom,P. J. Timans,K. Kakushima,E. Gusev,Z. Karim,D. Misra,Y. S. Obeng,S. De Gendt,H. Jagannathan
  • Publisher : The Electrochemical Society
  • Release Date : 2019-05-17
  • ISBN : 9781607688686
GET THIS BOOKSilicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9

This issue of ECS Transactions includes papers based on presentations from the symposium "Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9," originally held at the 235th ECS Meeting in Dallas, Texas, May 26-30, 2019.

Semiconductor Technology (ISTC 2001)

Semiconductor Technology (ISTC 2001)
  • Author : Ming Yang
  • Publisher : Unknown
  • Release Date : 2001
  • ISBN : UCAL:C3785029
GET THIS BOOKSemiconductor Technology (ISTC 2001)

Advances in Laser Materials Processing

Advances in Laser Materials Processing
  • Author : J. R. Lawrence
  • Publisher : Woodhead Publishing
  • Release Date : 2017-09-20
  • ISBN : 9780081012536
GET THIS BOOKAdvances in Laser Materials Processing

Advances in Laser Materials Processing: Technology, Research and Application, Second Edition, provides a revised, updated and expanded overview of the area, covering fundamental theory, technology and methods, traditional and emerging applications and potential future directions. The book begins with an overview of the technology and challenges to applying the technology in manufacturing. Parts Two thru Seven focus on essential techniques and process, including cutting, welding, annealing, hardening and peening, surface treatments, coating and materials deposition. The final part of the

Ion Implantation in Semiconductors 1976

Ion Implantation in Semiconductors 1976
  • Author : Fred Chernow
  • Publisher : Springer Science & Business Media
  • Release Date : 2012-12-06
  • ISBN : 9781461341963
GET THIS BOOKIon Implantation in Semiconductors 1976

The Fifth International Conference on Ion Implantation took place in Boulder, Colorado between the 9th and 13th of August 1976. Papers were delivered by scientists and engineers from 15 countries, and the attendees represented 19 countries. As has become the custom at these conferences, the sessions were intense with the coffee breaks and evenings given to informal meetings among the participants. It was a time to renew old friendships, begin new ones, exchange ideas, personally question authors of papers that appeared in the

Laser-Assisted Microtechnology

Laser-Assisted Microtechnology
  • Author : Simeon M. Metev,Vadim P. Veiko
  • Publisher : Springer Science & Business Media
  • Release Date : 2013-03-09
  • ISBN : 9783642872716
GET THIS BOOKLaser-Assisted Microtechnology

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a

ULSI Process Integration 5

ULSI Process Integration 5
  • Author : Cor L. Claeys
  • Publisher : The Electrochemical Society
  • Release Date : 2007-01-01
  • ISBN : 9781566775724
GET THIS BOOKULSI Process Integration 5

The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

Rapid Thermal and Other Short-time Processing Technologies II

Rapid Thermal and Other Short-time Processing Technologies II
  • Author : Dim-Lee Kwong,Electrochemical Society. Electronics Division,Electrochemical Society. High Temperature Materials Divisions
  • Publisher : The Electrochemical Society
  • Release Date : 2001
  • ISBN : 1566773156
GET THIS BOOKRapid Thermal and Other Short-time Processing Technologies II

"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."

Subsecond Annealing of Advanced Materials

Subsecond Annealing of Advanced Materials
  • Author : Wolfgang Skorupa,Heidemarie Schmidt
  • Publisher : Springer Science & Business Media
  • Release Date : 2013-12-16
  • ISBN : 9783319031316
GET THIS BOOKSubsecond Annealing of Advanced Materials

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes

Temperature Measurement during Millisecond Annealing

Temperature Measurement during Millisecond Annealing
  • Author : Denise Reichel
  • Publisher : Springer
  • Release Date : 2016-01-07
  • ISBN : 9783658113889
GET THIS BOOKTemperature Measurement during Millisecond Annealing

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the

Nanoscience and Technology

Nanoscience and Technology
  • Author : Chun Li Bai,Si Shen Xie,Xing Zhu
  • Publisher : Trans Tech Publications Ltd
  • Release Date : 2007-03-15
  • ISBN : 9783038131380
GET THIS BOOKNanoscience and Technology

Volume is indexed by Thomson Reuters CPCI-S (WoS). Nanotechnology has been a priority research field in many countries, because new discoveries in this field have the potential power to unravel new phenomena and new principles of materials use. This collection of knowledge concerning frontier issues in nanotechnology will aid the further promotion of the integration of nanotechnology and industry.

Zinc Compounds—Advances in Research and Application: 2013 Edition

Zinc Compounds—Advances in Research and Application: 2013 Edition
  • Author : Anonim
  • Publisher : ScholarlyEditions
  • Release Date : 2013-06-21
  • ISBN : 9781481693479
GET THIS BOOKZinc Compounds—Advances in Research and Application: 2013 Edition

Zinc Compounds—Advances in Research and Application: 2013 Edition is a ScholarlyBrief™ that delivers timely, authoritative, comprehensive, and specialized information about ZZZAdditional Research in a concise format. The editors have built Zinc Compounds—Advances in Research and Application: 2013 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about ZZZAdditional Research in this book to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Zinc Compounds—

Point Defects in Materials

Point Defects in Materials
  • Author : F. Agulló-López,Charles Richard Arthur Catlow,Peter David Townsend
  • Publisher : Unknown
  • Release Date : 1988
  • ISBN : UOM:39015016001748
GET THIS BOOKPoint Defects in Materials

This text provides an up-to-date coverage of the theoretical and experimental tools required for fundamental studies of point defects, with illustrative examples from a wide range of inorganic materials. On the experimental side a strong emphasis is placed on the powerful resonance and hyperfine methods which give detailed information on defect structures. Theoretical chapters cover statistical and quantum mechanical methods, particularly the computer simulations techniques which are now widely employed. The examples of applications of defect properties highlight the benefits